Simulation Software for Laser Heating of Multilayer Stacks

Example 2: Quadrilayer Stack Illuminated through Substrate

In this example a quadrilayer structure is simulated. The laser beam is incident on the multilayer stack from the substrate side.

Calculated profiles of temperature versus z are shown in Figure�(a). Isotherms in the XY-plane at z�=�115�nm appear in Figure (b).

Shown below is the file TR02.SYS, which contains the structural parameters of the multilayer, the laser beam profile, and the chosen mesh parameters. This text file, originally created by TEMPROFILE, can be modified by the user, and may be imported to the program environment during subsequent runs.

 ``````!@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@# ! @@ TEMPROFILE 5.0 File TR02.SYS @@ # ! @@ Date: 01/02/1999 Time: 17:26 @@ # ! @@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@ # ! # ! Notes: # ! # !!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!# \$ # Top/Bottom incidence: B # \$ # Substrate's index (n,k): 1.5300000 .00000000 # Thermal constants (C,K): 2.6000000 1.00000000E-02 # \$ # Number of layers: 4 # \$ # Layer 01: Thickness,n,k: 75.000000 2.0000000 .00000000 # C,K: 2.5000000 2.00000000E-02 # \$ # Layer 02: Thickness,n,k: 25.000000 3.6700000 3.8600000 # C,K: 3.5000000 .50000000 # \$ # Layer 03: Thickness,n,k: 60.000000 2.0000000 .00000000 # C,K: 2.5000000 2.00000000E-02 # \$ # Layer 04: Thickness,n,k: 40.000000 2.7000000 8.3000000 # C,K: 2.4000000 2.4000000 # \$ # Heat loss factor (GAMMA): .00000000 # \$ # Incident beam profile: Gaussian # Lambda,R0: 830.00000 560.00000 # Impulse: POWER,TAU,NSTEP: 1.0000000 1.0000000 5 # \$ # Mesh: RMAX,DLTAR: 6000.0000 50.000000 # ZMAX,DLTAZ: 600.00000 5.0000000 # TMAX: 100.00000 # !@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@#``````

The file TR02.PLS shown below, also created in Example 2, contains the laser pulse shape. Pairs of points (t,�P) at the corners of the piecewise linear function P(t), initially entered from the keyboard, are saved in this file. The user can modify the contents of this file with a text editor, and import it to the program environment during subsequent runs of TEMPROFILE.

 ``````!@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@# ! @@ TEMPROFILE 5.0 File TR02.PLS @@ # ! @@ Date: 01/02/1999 Time: 17:26 @@ # ! @@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@ # ! # ! Notes: # ! # !!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!# Point on pulse (t,P): .00000000 10.000000 # Point on pulse (t,P): 50.000000 10.000000 # Point on pulse (t,P): 50.000000 .00000000 # Point on pulse (t,P): 100.00000 .00000000 # !@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@#``````

(a) Profiles of temperature versus z at (x, y) = (0, 0) for several instants of time. The beam is stationary with respect to the stack.

(b)�Isotherms in the XY-plane at z�=�115�nm and at the fixed temperature T�=�125�C. The beam moves at V�=�10�m/s relative to the stack. The various isotherms, starting in the middle and moving outward, belong to time�=�10ns, 20ns, 30ns, 40ns, and 50ns.

 Examples:

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