Simulation Software for Laser Heating of Multilayer Stacks

Example 3. User-defined Laser Beam Profile

In this example the quadrilayer stack is illuminated by a user-defined laser beam profile incident from the surface side.

Calculated profiles of temperature versus z are shown in Figure�(a), and isotherms in the XY-plane at z�=�108�nm appear in Fig.�(b).

Shown below is the file TR03.SYS, which contains the structural parameters of the multilayer stack, the laser beam profile, and the chosen mesh parameters.

 ``````!@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@# ! @@ TEMPROFILE 5.0 File TR03.SYS @@ # ! @@ Date: 01/01/1999 Time: 13:18 @@ # ! @@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@ # ! # ! Notes: Quadrilayer stack used in Test Run 3. The incident beam profile # ! is user-defined. # ! # !!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!# \$ # Top/Bottom incidence: T # \$ # Substrate's index (n,k): 1.4600000 .00000000 # Thermal constants (C,K): 1.7000000 2.00000000E-03 # \$ # Number of layers: 4 # \$ # Layer 01: Thickness,n,k: 32.000000 1.2000000 6.9000000 # C,K: 2.7000000 2.4000000 # \$ # Layer 02: Thickness,n,k: 72.000000 1.5000000 .00000000 # C,K: 2.0000000 1.50000000E-02 # \$ # Layer 03: Thickness,n,k: 12.000000 3.1000000 3.5000000 # C,K: 2.6000000 .16000000 # \$ # Layer 04: Thickness,n,k: 100.00000 1.5000000 .00000000 # C,K: 2.0000000 1.50000000E-02 # \$ # Heat loss factor (GAMMA): .00000000 # \$ # Incident Beam Profile: User-defined # LAMBDA,RS: 632.80000 1000.0000 # Point on profile (r,I): .00000000 1.0000000 # Point on profile (r,I): 50.000000 .97260000 # Point on profile (r,I): 100.00000 .89480000 # Point on profile (r,I): 150.00000 .77880000 # Point on profile (r,I): 200.00000 .64120000 # Point on profile (r,I): 250.00000 .49940000 # Point on profile (r,I): 300.00000 .36790000 # Point on profile (r,I): 350.00000 .25640000 # Point on profile (r,I): 400.00000 .16900000 # Point on profile (r,I): 450.00000 .10540000 # Point on profile (r,I): 500.00000 6.22000000E-02 # Point on profile (r,I): 550.00000 3.47000000E-02 # Point on profile (r,I): 600.00000 1.83000000E-02 # Point on profile (r,I): 650.00000 9.10000000E-03 # Point on profile (r,I): 700.00000 4.30000000E-03 # Point on profile (r,I): 750.00000 1.90000000E-03 # Point on profile (r,I): 800.00000 8.00000000E-04 # Point on profile (r,I): 850.00000 3.00000000E-04 # Point on profile (r,I): 900.00000 1.00000000E-04 # Point on profile (r,I): 1000.0000 .00000000 # Impulse: POWER,TAU,NSTEP: 3.0000000 1.0000000 5 # \$ # Mesh: RMAX,DLTAR: 2000.0000 25.000000 # ZMAX,DLTAZ: 400.00000 4.0000000 # TMAX: 100.00000 # !@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@#``````

Shown below is the file GSSN.RIP, which contains the radial intensity profile (RIP) of the user-defined incident beam in Example 3. The user can modify the contents of this file with a text editor, then import it to the program environment during subsequent runs of TEMPROFILE.

 ``````!@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@# ! @@ TEMPROFILE 5.0 File GSSN.RIP @@ # ! @@ Date: 12/26/1998 Time: 12:04 @@ # ! @@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@ # ! # ! Notes: Gaussian intensity distribution with 1/e radius R0=300nm. # ! # !!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!# Point on profile (r,I): .00000000 1.0000000 # Point on profile (r,I): 50.000000 0.9726000 # Point on profile (r,I): 100.00000 0.8948000 # Point on profile (r,I): 150.00000 0.7788000 # Point on profile (r,I): 200.00000 0.6412000 # Point on profile (r,I): 250.00000 0.4994000 # Point on profile (r,I): 300.00000 0.3679000 # Point on profile (r,I): 350.00000 0.2564000 # Point on profile (r,I): 400.00000 0.1690000 # Point on profile (r,I): 450.00000 0.1054000 # Point on profile (r,I): 500.00000 0.0622000 # Point on profile (r,I): 550.00000 0.0347000 # Point on profile (r,I): 600.00000 0.0183000 # Point on profile (r,I): 650.00000 0.0091000 # Point on profile (r,I): 700.00000 0.0043000 # Point on profile (r,I): 750.00000 0.0019000 # Point on profile (r,I): 800.00000 0.0008000 # Point on profile (r,I): 850.00000 0.0003000 # Point on profile (r,I): 900.00000 0.0001000 # Point on profile (r,I): 1000.0000 0.0000000 # !@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@#``````

The file TR03.PLS shown below was created in Example 3, and contains the laser pulse shape. Pairs of points (t,�P) at the corners of the piecewise linear function P(t), initially entered from the keyboard, are saved in this file.

 `````` !@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@# ! @@ TEMPROFILE 5.0 File TR01.PLS @@ # ! @@ Date: 12/31/1998 Time: 18:34 @@ # ! @@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@ # ! # ! Notes: Trapezoidal pulse shape of the laser beam. The rise and fall # ! times are 10 nsec each, and the total pulse width is 60 nsec. # ! # !!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!# Point on pulse (t,P): 10.000000 2.0000000 # Point on pulse (t,P): 50.000000 2.0000000 # Point on pulse (t,P): 60.000000 .00000000 # Point on pulse (t,P): 100.00000 .00000000 # !@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@#``````

(a) Profiles of temperature versus z at (x,�y) = (0,�0) computed at several instants of time.

(b) Isotherms in the XY-plane at z�=�108�nm, time�=�50�ns. The hottest spot at the center has temperature T�=�237.15�C (above ambient). The plotted isotherms, starting in the middle and moving outward, correspond to T�=�237�C, 230�C, 220�C, 210�C, 200�C, 180�C, 160�C, 140�C, 120�C, and 100�C.

 Examples:

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